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Probe, Wire and Fiber Optic Sealing for Semiconductor Tools

Solutions for Semiconductor Applications

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  1. HAST Feedthrough for Nickel Plated Copper Wires with KaptonĀ® Insulation for Bias Measurement
  2. HAST Feedthrough for KaptonĀ® Insulation K-type Thermocouple Wire
  3. HAST Feedthrough for Copper Bias and Thermocouple Wires Using a High Density Feedthrough
  4. Fiber Optic Feedthrough for Laser Operated Interferometers Used for Precise Wafer Stage Movement
  5. Combination Feedthrough for Wire and Coolant Lines for an Ion Implanter












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